Invention Grant
- Patent Title: Manufacturing method of display device
- Patent Title (中): 显示装置的制造方法
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Application No.: US11857481Application Date: 2007-09-19
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Publication No.: US07704810B2Publication Date: 2010-04-27
- Inventor: Eiji Oue , Yasukazu Kimura , Daisuke Sonoda , Toshiyuki Matsuura , Takeshi Kuriyagawa
- Applicant: Eiji Oue , Yasukazu Kimura , Daisuke Sonoda , Toshiyuki Matsuura , Takeshi Kuriyagawa
- Applicant Address: JP Mobara-shi
- Assignee: Hitachi Displays, Ltd.
- Current Assignee: Hitachi Displays, Ltd.
- Current Assignee Address: JP Mobara-shi
- Agency: Antonelli, Terry, Stout & Kraus, LLP.
- Priority: JP2006-252261 20060919
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
In a display device manufacturing method including a step of forming a semiconductor film above a substrate and a step of implanting an impurity to each of a first semiconductor film in a first region of the substrate, a second semiconductor film in a second region outside the first region, and a third semiconductor film in a third region outside the first and second regions, the implanting step includes implanting an impurity in the third region so as to form a capacitor.
Public/Granted literature
- US20080070351A1 MANUFACTURING METHOD OF DISPLAY DEVICE Public/Granted day:2008-03-20
Information query
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