Invention Grant
- Patent Title: Semiconductor memory device with bit line of small resistance and manufacturing method thereof
- Patent Title (中): 具有小电阻位线的半导体存储器件及其制造方法
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Application No.: US11797406Application Date: 2007-05-03
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Publication No.: US07704831B2Publication Date: 2010-04-27
- Inventor: Satoshi Shimizu
- Applicant: Satoshi Shimizu
- Applicant Address: JP Tokyo
- Assignee: Renesas Technology Corp.
- Current Assignee: Renesas Technology Corp.
- Current Assignee Address: JP Tokyo
- Agency: McDermott Will & Emery LLP
- Priority: JP2003-287831 20030806
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
A reduction of a resistance of a bit line of a memory cell array and a reduction of a forming area of the memory cell array are planed.Respective bit lines running at right angles to a word line are composed of a diffusion bit line formed in a semiconductor substrate and a linear metal bit line on an upper side of the diffusion bit line. The diffusion bit line is formed in a linear pattern on a lower side of the metal bit line in the same manner, and the metal bit line is connected with the diffusion bit line between the word lines. An interlayer insulating film is formed on the memory cell array, and the metal bit line is formed with being buried in it.
Public/Granted literature
- US20070205457A1 Semiconductor memory device with bit line of small resistance and manufacturing method thereof Public/Granted day:2007-09-06
Information query
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