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US07705292B2 Method and apparatus for detecting a condition of an optical element 有权
用于检测光学元件的状态的方法和装置

Method and apparatus for detecting a condition of an optical element
Abstract:
A condition or detecting a change in the condition of an optical element of a laser arrangement is detected. An ultrasonic signal is coupled into an optical element such that the ultrasonic signal travels along a path within the optical element, and a transit time or a change in transit time for the ultrasonic signal to travel along the path within the optical element is detected.
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