Invention Grant
US07705323B2 Microscope stage with flexural axis 有权
具有弯曲轴的显微镜台

Microscope stage with flexural axis
Abstract:
A microscope stage with a flexural axis may exhibit predictable flexure characteristics and limited cross-coupling translations. Z motion of a Z plate proximate to a Z actuator may be substantially linear, while a distal side of the Z plate may be allowed to rotate about a hinge axis associated with a flexural component.
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