Invention Grant
- Patent Title: Monolithically integrated photodetectors
- Patent Title (中): 单片式光电探测器
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Application No.: US11591658Application Date: 2006-11-01
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Publication No.: US07705370B2Publication Date: 2010-04-27
- Inventor: Eugene A. Fitzgerald
- Applicant: Eugene A. Fitzgerald
- Applicant Address: US MA Cambridge
- Assignee: Massachusetts Institute of Technology
- Current Assignee: Massachusetts Institute of Technology
- Current Assignee Address: US MA Cambridge
- Agency: Wolf, Greenfield & Sacks, P.C.
- Main IPC: H01L31/0328
- IPC: H01L31/0328

Abstract:
Methods and structures for monolithically integrating monocrystalline silicon and monocrystalline non-silicon materials and devices are provided. In one structure, a monolithically integrated semiconductor device structure comprises a silicon substrate and a first monocrystalline semiconductor layer disposed over the silicon substrate, wherein the first monocrystalline semiconductor layer has a lattice constant different from a lattice constant of relaxed silicon. The structure further includes an insulating layer disposed over the first monocrystalline semiconductor layer in a first region and a monocrystalline silicon layer disposed over the insulating layer in the first region. The structure includes at least one silicon-based photodetector comprising an active region including at least a portion of the monocrystalline silicon layer. The structure also includes a second monocrystalline semiconductor layer disposed over at least a portion of the first monocrystalline semiconductor layer in a second region and absent from the first region, wherein the second monocrystalline semiconductor layer has a lattice constant different from the lattice constant of relaxed silicon. The structure includes at least one non-silicon photodetector comprising an active region including at least a portion of the second monocrystalline semiconductor layer.
Public/Granted literature
- US20090242935A1 MONOLITHICALLY INTEGRATED PHOTODETECTORS Public/Granted day:2009-10-01
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