Invention Grant
- Patent Title: Micromechanical component and method for producing a micromechanical component
- Patent Title (中): 微机械部件及其制造方法
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Application No.: US12221368Application Date: 2008-08-01
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Publication No.: US07705413B2Publication Date: 2010-04-27
- Inventor: Heribert Weber , Ralf Hausner
- Applicant: Heribert Weber , Ralf Hausner
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102007044806 20070920
- Main IPC: H01L29/84
- IPC: H01L29/84

Abstract:
A micromechanical component, in particular a micromechanical sensor, having a first wafer and a second wafer is provided, the first wafer having at least one structural element, and the second wafer having at least one mating structural element, and, in addition, the structural element and the mating structural element are designed in such a way that a relative displacement of the first wafer relative to the second wafer parallel to a main extension plane of the first wafer essentially leads to compressive loading or tensile loading between the structural element and the mating structural element.
Public/Granted literature
- US20090079037A1 Micromechanical component and method for producing a micromechanical component Public/Granted day:2009-03-26
Information query
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