Invention Grant
- Patent Title: Resistive heater for thermo optic device
- Patent Title (中): 用于热光器件的电阻加热器
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Application No.: US11305709Application Date: 2005-12-16
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Publication No.: US07706647B2Publication Date: 2010-04-27
- Inventor: Gurtej Singh Sandhu , Guy T. Blalock
- Applicant: Gurtej Singh Sandhu , Guy T. Blalock
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Schwegman, Lundberg & Woessner, P.A.
- Main IPC: G02B6/34
- IPC: G02B6/34

Abstract:
Resistive heaters formed in two mask counts on a surface of a grating of a thermo optic device thereby eliminating one mask count from prior art manufacturing methods. The resistive heater is comprised of a heater region and a conductive path region formed together in a first mask count from a relatively high resistance material. A conductor formed from a relatively low resistance material is formed directly on the conductive path region in a second mask count. Thermo optic devices formed by these two mask count methods are also described.
Public/Granted literature
- US20060098911A1 Resistive heater for thermo optic device Public/Granted day:2006-05-11
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