Invention Grant
- Patent Title: Method for manufacturing a piezoelectric element
- Patent Title (中): 压电元件的制造方法
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Application No.: US11358836Application Date: 2006-02-20
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Publication No.: US07707701B2Publication Date: 2010-05-04
- Inventor: Setsuya Iwashita , Koji Ohashi , Takamitsu Higuchi
- Applicant: Setsuya Iwashita , Koji Ohashi , Takamitsu Higuchi
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2005-089167 20050325
- Main IPC: H01L41/22
- IPC: H01L41/22 ; H01L41/00 ; B41J2/045

Abstract:
A method for manufacturing a piezoelectric element includes the steps of forming a first electrode above a substrate, forming above the first electrode a piezoelectric layer composed of a piezoelectric material having a perovskite structure, and forming a second electrode above the piezoelectric layer, wherein the step of forming the first electrode includes forming a lanthanum nickelate layer that is oriented to a cubic (100) by a sputter method, and a ratio of nickel to lanthanum (Ni/La) in a target used for the sputter method is greater than 1 but smaller than 1.5.
Public/Granted literature
- US20060213043A1 Piezoelectric element and method for manufacturing the same, ink jet recording head and ink jet printer Public/Granted day:2006-09-28
Information query
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