Invention Grant
- Patent Title: Method for producing a microcoil
- Patent Title (中): 微线圈生产方法
-
Application No.: US10498278Application Date: 2002-11-12
-
Publication No.: US07707714B2Publication Date: 2010-05-04
- Inventor: Oliver G. Schmidt , Christoph Deneke
- Applicant: Oliver G. Schmidt , Christoph Deneke
- Applicant Address: DE Munich
- Assignee: Max-Planck Gesellschaft zur Forderung der Wissenschaften E.V.
- Current Assignee: Max-Planck Gesellschaft zur Forderung der Wissenschaften E.V.
- Current Assignee Address: DE Munich
- Priority: DE10159415 20011204
- International Application: PCT/DE02/04180 WO 20021112
- International Announcement: WO03/048032 WO 20030612
- Main IPC: H01R9/00
- IPC: H01R9/00

Abstract:
Production of microscopic and nanoscopic coils, by rolling up conductor layers during the removal of auxiliary layers from a substrate. By removing the auxiliary layer from the substrate, for example by virtue of a sacrificial layer situated in between being selectively etched away, the auxiliary layer folds back and, if appropriate, automatically rolls up upon continuation of the removal operation and a conductor track concomitantly rolls up in the process. The auxiliary layer may be formed by two layers having different lattice constants. It is possible to produce microcoils, microtransformers, or microcapacitors constructed from said microcoils, with diameters in the nanometers or micrometers range.
Public/Granted literature
Information query