Invention Grant
- Patent Title: Three-dimensional nanoscale metrology using FIRAT probe
- Patent Title (中): 使用FIRAT探针的三维纳米尺度计量
-
Application No.: US12136399Application Date: 2008-06-10
-
Publication No.: US07707873B2Publication Date: 2010-05-04
- Inventor: Fahrettin L. Degertekin
- Applicant: Fahrettin L. Degertekin
- Applicant Address: US GA Atlanta
- Assignee: Georgia Tech Research Corporation
- Current Assignee: Georgia Tech Research Corporation
- Current Assignee Address: US GA Atlanta
- Agency: Bockhop & Associates, LLC
- Agent Bryan W. Bockhop
- Main IPC: G01B5/28
- IPC: G01B5/28

Abstract:
In accordance with an embodiment of the invention, there is a force sensor for a probe based instrument. The force sensor can comprise a detection surface and a flexible mechanical structure disposed a first distance above the detection surface so as to form a gap between the flexible mechanical structure and the detection surface, wherein the flexible mechanical structure is configured to deflect upon exposure to an external force, thereby changing the first distance over a selected portion of the gap, the change in distance at the selected portion orienting a probe tip of the force sensor for multi-directional measurement.
Public/Granted literature
- US20080307865A1 Three-Dimensional Nanoscale Metrology using FIRAT Probe Public/Granted day:2008-12-18
Information query