Invention Grant
- Patent Title: Processing apparatus and lid opening/closing mechanism
- Patent Title (中): 处理装置和盖打开/关闭机构
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Application No.: US11684717Application Date: 2007-03-12
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Publication No.: US07707965B2Publication Date: 2010-05-04
- Inventor: Jun Yamashita
- Applicant: Jun Yamashita
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2006-067733 20060313
- Main IPC: C23C16/00
- IPC: C23C16/00 ; C23F1/00 ; H01L21/306

Abstract:
A processing apparatus includes an openable/closable lid disposed on a process container, and an opening/closing mechanism configured to open/close the lid. The opening/closing mechanism includes a hinge structure swingably coupling the lid to one end of the process container, and a drive structure configured to swing the lid. The hinge structure includes a main shaft used as a rotation axis when the lid is swung by the drive structure, and an adjusting shaft located on a distal end side relative to the main shaft, for adjusting an angle of the lid.
Public/Granted literature
- US20070238307A1 PROCESSING APPARATUS AND LID OPENING/CLOSING MECHANISM Public/Granted day:2007-10-11
Information query
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