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US07708828B2 Dust-free and pore-free, high-purity granulated polysilicon 有权
无尘,无孔,高纯度的多晶硅颗粒

Dust-free and pore-free, high-purity granulated polysilicon
Abstract:
A polycrystalline granulated silicon is made of particles which have a density of greater than 99.9% of the theoretical solid density and therefore have a pore content of less than 0.1% and have a surface roughness Ra of less than 150 nm.
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