Invention Grant
- Patent Title: Work carrier and method of processing a workpiece
- Patent Title (中): 工作载体和加工工件的方法
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Application No.: US10729882Application Date: 2003-12-05
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Publication No.: US07708854B2Publication Date: 2010-05-04
- Inventor: Werner Kröninger , Günter Lang
- Applicant: Werner Kröninger , Günter Lang
- Applicant Address: DE Munich
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Munich
- Agency: Brinks Hofer Gilson & Lione
- Priority: DE10260233 20021220
- Main IPC: B32B38/10
- IPC: B32B38/10 ; B32B37/10 ; B32B7/12
Abstract:
Explained, inter alia, is a method in which a workpiece (52) to be processed is fastened to a work carrier (10) by means of a solid (62). The work carrier (10) is made of a porous material, e.g. of porous ceramic. This processing method permits simple manipulation of the wafer during the processing. In addition, the workpiece (52) can be easily separated from the work carrier (10) using a solvent.
Public/Granted literature
- US20040231793A1 Method of processing a workpiece, and a work carrier, in particular of porous ceramic Public/Granted day:2004-11-25
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