Invention Grant
- Patent Title: Image sensor and method for manufacturing the same
- Patent Title (中): 图像传感器及其制造方法
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Application No.: US12254018Application Date: 2008-10-20
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Publication No.: US07709286B2Publication Date: 2010-05-04
- Inventor: So-Eun Park
- Applicant: So-Eun Park
- Applicant Address: KR Seoul
- Assignee: Dongbu HiTek Co., Ltd.
- Current Assignee: Dongbu HiTek Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: Sherr & Vaughn, PLLC
- Priority: KR10-2007-0112546 20071106
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
An image sensor includes defining an active region in a substrate by forming a device isolating layer; and then sequentially forming a photodiode and a logic unit in the active region; and then forming a first passivation layer on the photodiode and the logic unit; and then forming a trench in the first passivation layer by selectively removing a portion of the first protective layer corresponding to an uppermost surface of the photodiode; and then forming a second passivation layer buried in the trench. Forming a thick second passivation layer in the trench which spatially corresponds to the photodiode can offset dangling bonds on the surface of the substrate in a subsequent annealing process while also reducing dark current and enhance photosensitivity of the photodiode.
Public/Granted literature
- US20090115015A1 IMAGE SENSOR AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2009-05-07
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