Invention Grant
- Patent Title: Method of disposing selectively two types of substances on surface of substrate
- Patent Title (中): 在基片表面选择性地布置两种物质的方法
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Application No.: US12627801Application Date: 2009-11-30
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Publication No.: US07709291B2Publication Date: 2010-05-04
- Inventor: Tohru Nakagawa
- Applicant: Tohru Nakagawa
- Applicant Address: JP Osaka
- Assignee: Panasonic Corporation
- Current Assignee: Panasonic Corporation
- Current Assignee Address: JP Osaka
- Agency: McDermott Will & Emery LLP
- Priority: JP2008-091076 20080331
- Main IPC: H01L21/84
- IPC: H01L21/84
Abstract:
The present invention is a method of disposing selectively on a surface of a substrate a first substance having a hydrophilic surface and a second substance having a surface coated with a hydrocarbon group. The substrate has on the surface thereof a hydrophilic first region, a second region coated with a hydrocarbon group, and a third region coated with a fluorocarbon group. The method of the present invention includes the steps of; (1) applying a solution containing the first substance and an aqueous solvent to the substrate; (2) removing the aqueous solvent from the surface of the substrate so as to dispose the first substance on a surface of the first region; (3) dipping the substrate in a liquid containing alcohol having fluorine in its molecule; (4) applying a solution containing the second substance and an organic solvent to the surface of the substrate that has been dipped in the liquid; (5) pulling the substrate out of the liquid; and (6) removing the organic solvent from the surface of the substrate so as to dispose the second substance on a surface of the second region.
Public/Granted literature
- US20100073452A1 METHOD OF DISPOSING SELECTIVELY TWO TYPES OF SUBSTANCES ON SURFACE OF SUBSTRATE Public/Granted day:2010-03-25
Information query
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