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US07709311B1 JFET device with improved off-state leakage current and method of fabrication 失效
具有改善的截止状态漏电流的JFET器件和制造方法

JFET device with improved off-state leakage current and method of fabrication
Abstract:
A junction field effect transistor comprises a semiconductor substrate. A first impurity region of a first conductivity type is formed in the substrate. A second impurity region of the first conductivity type is formed in the substrate and spaced apart from the first impurity region. A channel region of the first conductivity type is formed between the first and second impurity regions. A gate region of a second conductivity type is formed in the substrate between the first and second impurity regions. A gap region is formed in the substrate between the gate region and the first impurity region such that the first impurity region is spaced apart from the gate region.
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