Invention Grant
- Patent Title: Flash memory device and fabricating method thereof
- Patent Title (中): 闪存装置及其制造方法
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Application No.: US11024700Application Date: 2004-12-30
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Publication No.: US07709321B2Publication Date: 2010-05-04
- Inventor: Jin Hyo Jung
- Applicant: Jin Hyo Jung
- Applicant Address: KR Seoul
- Assignee: Dongbu Electronics Co., Ltd.
- Current Assignee: Dongbu Electronics Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: Lowe Hauptman Ham & Berner LLP
- Priority: KR10-2003-0101069 20031231
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
A flash memory and a flash memory fabrication method for increasing the coupling ratio by HSG including forming a STI region on a silicon substrate to define an active region, forming a tunneling oxide layer on the active region, and depositing an amorphous silicon layer on the silicon substrate. The method also includes patterning the amorphous silicon layer along a bit line direction, forming an embossed silicon layer including HSGs on the patterned amorphous silicon layer, and sequentially depositing an ONO layer and a polysilicon layer for a control gate on the resulting structure. The method further includes forming a photoresist pattern on the polysilicon layer, and forming a control gate by etching the polysilicon layer using the photoresist pattern as a mask, and simultaneously forming a floating gate along the bit line.
Public/Granted literature
- US20050142749A1 Flash memory device and fabricating method thereof Public/Granted day:2005-06-30
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