Invention Grant
US07709329B2 High-voltage variable breakdown voltage (BV) diode for electrostatic discharge (ESD) applications
有权
用于静电放电(ESD)应用的高压可变击穿电压(BV)二极管
- Patent Title: High-voltage variable breakdown voltage (BV) diode for electrostatic discharge (ESD) applications
- Patent Title (中): 用于静电放电(ESD)应用的高压可变击穿电压(BV)二极管
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Application No.: US11708190Application Date: 2007-02-20
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Publication No.: US07709329B2Publication Date: 2010-05-04
- Inventor: Martin B. Mollat , Tony Thanh Phan
- Applicant: Martin B. Mollat , Tony Thanh Phan
- Applicant Address: US TX Dallas
- Assignee: Texas Instruments Incorporated
- Current Assignee: Texas Instruments Incorporated
- Current Assignee Address: US TX Dallas
- Agent Warren L. Franz; Wade J. Brady, III; Frederick J. Telecky, Jr.
- Main IPC: H01L21/8234
- IPC: H01L21/8234

Abstract:
Formation of an electrostatic discharge (ESD) protection device having a desired breakdown voltage (BV) is disclosed. The breakdown voltage (BV) of the device can be set, at least in part, by varying the degree to which a surface junction between two doped areas is covered. This junction can be covered in one embodiment by a dielectric material and/or a semiconductor material. Moreover, a variable breakdown voltage can be established by concurrently forming, in a single process flow, multiple diodes that have different breakdown voltages, where the diodes are also formed concurrently with circuitry that is to be protected. To generate the variable or different breakdown voltages, respective edges of isolation regions can be extended to cover more of the surface junctions of different diodes. In this manner, a first diode can have a first breakdown voltage (BV1), a second diode can have a second breakdown voltage (BV2), a third diode can have a third breakdown voltage (BV3), etc. This can provide substantial efficiency and cost savings where there may be varying ESD requirements.
Public/Granted literature
- US20080197451A1 High-voltage variable breakdown voltage (BV) diode for electrostatic discharge (ESD) applications Public/Granted day:2008-08-21
Information query
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