Invention Grant
US07709332B2 Process for fabricating a field-effect transistor with self-aligned gates
有权
用于制造具有自对准栅极的场效应晶体管的工艺
- Patent Title: Process for fabricating a field-effect transistor with self-aligned gates
- Patent Title (中): 用于制造具有自对准栅极的场效应晶体管的工艺
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Application No.: US12224624Application Date: 2007-03-26
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Publication No.: US07709332B2Publication Date: 2010-05-04
- Inventor: Christophe Licitra , Bernard Previtali
- Applicant: Christophe Licitra , Bernard Previtali
- Applicant Address: FR Paris
- Assignee: Commissariat a l'Energie Atomique
- Current Assignee: Commissariat a l'Energie Atomique
- Current Assignee Address: FR Paris
- Agency: Oliff & Berridge, PLC
- Priority: FR0602682 20060328
- International Application: PCT/FR2007/000520 WO 20070326
- International Announcement: WO2007/110507 WO 20071004
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
A first gate, formed on a substrate, is surmounted by a hard layer designed, with first spacers surrounding the first gate, to act as etching mask to bound the channel and a pad that bounds a space subsequently used to form a gate cavity. The hard layer is preferably made of silicon nitride. Before flipping and bonding, a bounding layer, preferably made of amorphous silicon or polysilicon, is formed to bound drain and source areas. After flipping and bonding of the assembly on a second substrate, a second gate is formed in the gate cavity. At least partial silicidation of the bounding layer is then performed before the metal source and drain electrodes are produced.
Public/Granted literature
- US20090011562A1 Process for Fabricating a Field-Effect Transistor with Self-Aligned Gates Public/Granted day:2009-01-08
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