Invention Grant
US07709795B2 Infrared sensor unit and process of fabricating the same 失效
红外传感器单元及其制造工艺

Infrared sensor unit and process of fabricating the same
Abstract:
An infrared sensor unit has a thermal infrared sensor and an associated semiconductor device commonly developed on a semiconductor substrate. A dielectric top layer covers the substrate to conceal the semiconductor device formed in the top surface of the substrate. The thermal infrared sensor carried on a sensor mount which is supported above the semiconductor device by means of a thermal insulation support. The sensor mount and the support are made of a porous material which is superimposed on top of the dielectric top layer.
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