Invention Grant
- Patent Title: Ion beams in an ion implanter
- Patent Title (中): 离子注入机中的离子束
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Application No.: US11806849Application Date: 2007-06-04
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Publication No.: US07709817B2Publication Date: 2010-05-04
- Inventor: Christopher Burgess , Martin Keane
- Applicant: Christopher Burgess , Martin Keane
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Boult Wade Tennant
- Priority: GB0611460.7 20060609
- Main IPC: G21K5/04
- IPC: G21K5/04

Abstract:
A method of tuning an ion beam in an ion implanter relative to, e.g., ion beam current, energy, size and shape, includes retrieving a set of parameters associated with operation of the ion implanter, at least some of which are stored in a dynamic database, configuring the ion implanter according to the retrieved set of parameters, to thereby provide an ion beam, optimizing the ion beam by varying one or more of the parameters, and updating the parameters stored in the dynamic database which changed during optimization.
Public/Granted literature
- US20080061251A1 Ion beams in an ion implanter Public/Granted day:2008-03-13
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