Invention Grant
- Patent Title: Phase change memory and manufacturing method thereof
- Patent Title (中): 相变记忆及其制造方法
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Application No.: US11771601Application Date: 2007-06-29
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Publication No.: US07709822B2Publication Date: 2010-05-04
- Inventor: Ilya V. Karpov , Charles C. Kuo , Yudong Kim , Greg Atwood
- Applicant: Ilya V. Karpov , Charles C. Kuo , Yudong Kim , Greg Atwood
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroeletronics S.r.l.
- Current Assignee: STMicroeletronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group PLLC
- Agent Lisa K. Jorgenson; Robert Iannucci
- Priority: EP04107071 20041230
- Main IPC: H01L47/00
- IPC: H01L47/00

Abstract:
Both a chalcogenide select device and a chalcogenide memory element are formed within vias within dielectrics. As a result, the chalcogenides is effectively trapped within the vias and no glue or adhesion layer is needed. Moreover, delamination problems are avoided. A lance material is formed within the same via with the memory element. In one embodiment, the lance material is made thinner by virtue of the presence of a sidewall spacer; in another embodiment no sidewall spacer is utilized. A relatively small area of contact between the chalcogenide used to form a memory element and the lance material is achieved by providing a pin hole opening in a dielectric, which separates the chalcogenide and the lance material.
Public/Granted literature
- US20080029752A1 PHASE CHANGE MEMORY AND MANUFACTURING METHOD THEREOF Public/Granted day:2008-02-07
Information query
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