Invention Grant
- Patent Title: Group-III nitride vertical-rods substrate
- Patent Title (中): III族氮化物垂直杆基板
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Application No.: US11552527Application Date: 2006-10-25
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Publication No.: US07709823B2Publication Date: 2010-05-04
- Inventor: Chih-Ming Lai , Wen-Yueh Liu , Jenq-Dar Tsay , Jung-Tsung Hsu , Shang-Jr Gwo , Chang-Hong Shen , Hon-Way Lin
- Applicant: Chih-Ming Lai , Wen-Yueh Liu , Jenq-Dar Tsay , Jung-Tsung Hsu , Shang-Jr Gwo , Chang-Hong Shen , Hon-Way Lin
- Applicant Address: TW Hsinchu TW Hsinchu
- Assignee: Industrial Technology Research Institute,National Tsing Hua University
- Current Assignee: Industrial Technology Research Institute,National Tsing Hua University
- Current Assignee Address: TW Hsinchu TW Hsinchu
- Agency: Jianq Chyun IP Office
- Priority: TW95118646A 20060525
- Main IPC: H01L29/12
- IPC: H01L29/12

Abstract:
The invention is directed to a group-III nitride vertical-rods substrate. The group-III vertical-rods substrate comprises a substrate, a buffer layer and a vertical rod layer. The buffer layer is located over the substrate. The vertical rod layer is located on the buffer layer and the vertical rod layer is comprised of a plurality of vertical rods standing on the buffer layer.
Public/Granted literature
- US20070272914A1 GROUP-III NITRIDE VERTICAL-RODS SUBSTRATE Public/Granted day:2007-11-29
Information query
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