Invention Grant
- Patent Title: Bottom gate thin film transistor, flat panel display having the same and method of fabricating the same
- Patent Title (中): 底栅薄膜晶体管,具有相同的平板显示器及其制造方法
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Application No.: US11232290Application Date: 2005-09-21
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Publication No.: US07709840B2Publication Date: 2010-05-04
- Inventor: Keun-Soo Lee
- Applicant: Keun-Soo Lee
- Applicant Address: KR Yongin, Gyunggi-do
- Assignee: Samsung Mobile Display Co., Ltd.
- Current Assignee: Samsung Mobile Display Co., Ltd.
- Current Assignee Address: KR Yongin, Gyunggi-do
- Agency: Knobbe Martens Olson & Bear LLP
- Priority: KR10-2004-0079693 20041006
- Main IPC: H01L29/04
- IPC: H01L29/04

Abstract:
A bottom gate thin film transistor (TFT), a flat panel display having the same, and a method of fabricating the same are disclosed. The TFT comprises a gate electrode disposed on a substrate, and a gate insulating layer disposed on the gate electrode. A semiconductor layer is disposed on the gate insulating layer and crossing over the gate electrode, and is crystallized by an MILC technique. An inter-insulating layer is disposed on the semiconductor layer and comprises source and drain contact holes which expose portions of the semiconductor layer. The source and drain contact holes are separated from at least one edge of the semiconductor layer crossing over the gate electrode. The semiconductor layer comprises conductive MIC regions corresponding to the exposed portions of the semiconductor layer in the source and drain contact holes.
Public/Granted literature
- US20060071211A1 Bottom gate thin film transistor, flat panel display having the same and method of fabricating the same Public/Granted day:2006-04-06
Information query
IPC分类: