Invention Grant
- Patent Title: Thin film transistor and pixel structure
- Patent Title (中): 薄膜晶体管和像素结构
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Application No.: US11949781Application Date: 2007-12-04
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Publication No.: US07709886B2Publication Date: 2010-05-04
- Inventor: Wei-Hsiang Lo , Hao-Chieh Lee
- Applicant: Wei-Hsiang Lo , Hao-Chieh Lee
- Applicant Address: TW Hsinchu
- Assignee: Au Optronics Corporation
- Current Assignee: Au Optronics Corporation
- Current Assignee Address: TW Hsinchu
- Agency: Jianq Chyun IP Office
- Priority: TW96116613A 20070510
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L21/336 ; H01L29/786

Abstract:
A fabricating method of a TFT includes first forming a source on a substrate. Then, a first insulation pattern layer is formed to cover parts of the source and the substrate. The first insulation pattern layer has an opening exposing a part of the source. Thereafter, a gate pattern layer is formed on the first insulation pattern layer. Then, the gate pattern layer and a second insulation pattern layer formed thereon surround the opening. Moreover, a second lateral protection wall is formed on an edge of the gate pattern layer in the opening. Afterwards, a channel layer is formed in the opening and covers the second lateral protection wall and the source. Then, a passivation layer with a contact window is formed on the channel layer and the second insulation pattern layer to expose a portion of the channel layer. Thereafter, a drain is formed on the exposed channel layer.
Public/Granted literature
- US20080277721A1 THIN FILM TRANSISTOR, PIXEL STRUCTURE AND FABRICATING METHOD THEREOF Public/Granted day:2008-11-13
Information query
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