Invention Grant
US07709902B2 Metal gate CMOS with at least a single gate metal and dual gate dielectrics
有权
具有至少一个栅极金属和双栅极电介质的金属栅极CMOS
- Patent Title: Metal gate CMOS with at least a single gate metal and dual gate dielectrics
- Patent Title (中): 具有至少一个栅极金属和双栅极电介质的金属栅极CMOS
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Application No.: US12211647Application Date: 2008-09-16
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Publication No.: US07709902B2Publication Date: 2010-05-04
- Inventor: Bruce B. Doris , Young-Hee Kim , Barry P. Linder , Vijay Narayanan , Vamsi K. Paruchuri
- Applicant: Bruce B. Doris , Young-Hee Kim , Barry P. Linder , Vijay Narayanan , Vamsi K. Paruchuri
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Louis J. Percello, Esq.
- Main IPC: H01L31/119
- IPC: H01L31/119

Abstract:
A complementary metal oxide semiconductor (CMOS) structure including at least one nFET and at least one pFET located on a surface of a semiconductor substrate is provided. In accordance with the present invention, the nFET and the pFET both include at least a single gate metal and the nFET gate stack is engineered to have a gate dielectric stack having no net negative charge and the pFET gate stack is engineered to have a gate dielectric stack having no net positive charge. In particularly, the present invention provides a CMOS structure in which the nFET gate stack is engineered to include a band edge workfunction and the pFET gate stack is engineered to have a ¼ gap workfunction. In one embodiment of the present invention, the first gate dielectric stack includes a first high k dielectric and an alkaline earth metal-containing layer or a rare earth metal-containing layer, while the second high k gate dielectric stack comprises a second high k dielectric.
Public/Granted literature
- US20090008719A1 METAL GATE CMOS WITH AT LEAST A SINGLE GATE METAL AND DUAL GATE DIELECTRICS Public/Granted day:2009-01-08
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