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US07709905B2 Dual damascene wiring and method 有权
双镶嵌线和方法

Dual damascene wiring and method
Abstract:
A structure and method of fabricating a dual damascene interconnect structure, the structure including a dual damascene wire in a dielectric layer, the dual damascene wires extending a distance into the dielectric layer less than the thickness of the dielectric layer and dual damascene via bars integral with and extending from bottom surfaces of the dual damascene wires to a bottom surface of the dielectric layer.
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