Invention Grant
- Patent Title: Dual damascene wiring and method
- Patent Title (中): 双镶嵌线和方法
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Application No.: US11672220Application Date: 2007-02-07
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Publication No.: US07709905B2Publication Date: 2010-05-04
- Inventor: Thomas L. McDevitt , Anthony K. Stamper
- Applicant: Thomas L. McDevitt , Anthony K. Stamper
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Schmeiser, Olsen & Watts
- Agent Richard M. Kotulak
- Main IPC: H01L27/088
- IPC: H01L27/088

Abstract:
A structure and method of fabricating a dual damascene interconnect structure, the structure including a dual damascene wire in a dielectric layer, the dual damascene wires extending a distance into the dielectric layer less than the thickness of the dielectric layer and dual damascene via bars integral with and extending from bottom surfaces of the dual damascene wires to a bottom surface of the dielectric layer.
Public/Granted literature
- US20070128848A1 DUAL DAMASCENE WIRING AND METHOD Public/Granted day:2007-06-07
Information query
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