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US07709958B2 Methods and structures for interconnect passivation 失效
互连钝化的方法和结构

  • Patent Title: Methods and structures for interconnect passivation
  • Patent Title (中): 互连钝化的方法和结构
  • Application No.: US11156122
    Application Date: 2005-06-17
  • Publication No.: US07709958B2
    Publication Date: 2010-05-04
  • Inventor: Uri Cohen
  • Applicant: Uri Cohen
  • Main IPC: H01L23/48
  • IPC: H01L23/48
Methods and structures for interconnect passivation
Abstract:
One or more embodiments of the present invention relate to structures obtained by methods (a) for growing a film by an intermixing growth process, or (b) by depositing a film, which film includes chalcogenides of copper and/or silver (but excluding oxides), such as, for example, copper sulfide (CuSX and/or Cu2SX, where 0.7≦X≦1.3; and X=1.0 for stoichiometric compounds).
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