Invention Grant
- Patent Title: Metal line of semiconductor device and method of manufacturing the same
- Patent Title (中): 半导体器件的金属线及其制造方法
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Application No.: US11842851Application Date: 2007-08-21
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Publication No.: US07709965B2Publication Date: 2010-05-04
- Inventor: Seung Hyun Kim
- Applicant: Seung Hyun Kim
- Applicant Address: KR Seoul
- Assignee: Dongbu Hitek Co., Ltd.
- Current Assignee: Dongbu Hitek Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: Saliwanchik, Lloyd & Saliwanchik
- Priority: KR10-2006-0135605 20061227
- Main IPC: H01L23/52
- IPC: H01L23/52 ; H01L23/48 ; H01L29/40

Abstract:
Disclosed are a metal line of a semiconductor device and a method of manufacturing the same. In one embodiment, the metal line includes a first interlayer dielectric layer pattern formed on a lower interconnection structure and having a via hole that exposes a lower interconnection of the lower interconnection structure, a first barrier pattern selectively covering a sidewall of the via hole and the lower interconnection, a second interlayer dielectric layer pattern on the first interlayer dielectric layer pattern and having a trench that exposes the via hole, a second barrier pattern covering an inner wall of the trench and the first barrier pattern, a seed pattern formed on the second barrier pattern, and a copper line formed on the seed pattern.
Public/Granted literature
- US20080157371A1 Metal Line of Semiconductor Device and Method of Manufacturing the Same Public/Granted day:2008-07-03
Information query
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