Invention Grant
- Patent Title: Electron beam apparatus
- Patent Title (中): 电子束装置
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Application No.: US12051890Application Date: 2008-03-20
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Publication No.: US07710010B2Publication Date: 2010-05-04
- Inventor: Jun Iba , Hisanobu Azuma
- Applicant: Jun Iba , Hisanobu Azuma
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2007-096401 20070402
- Main IPC: H01J29/86
- IPC: H01J29/86

Abstract:
A three-dimensional structure forming a space in which a wiring-side portion of a device electrode is located is arranged on a rear plate. A surface potential of the three-dimensional structure is defined so that an electric field intensity of the space becomes weaker than an average electric field intensity expressed below, average electric field intensity=Va/d, where Va is application voltage of an anode electrode, and d is an interval between a rear plate and the face plate. The device electrode includes a high-temperature portion where temperature locally rises when current flows through the device electrode. The high-temperature portion is positioned in the space or at a distance of less than or equal to 20 μm from the space.
Public/Granted literature
- US20080238288A1 ELECTRON BEAM APPARATUS Public/Granted day:2008-10-02
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