A semiconductor integrated circuit device 100A includes: an integrated circuit body 106A having a plurality of MOSFETs on a semiconductor substrate; a plurality of elements 102A to be measured placed on the same substrate as the plurality of MOSFETs; a monitor circuit 105A for selecting an element to be measured whose measured parameter value is in a predetermined rank among the plurality of elements 102A to be measured as an element 101A to be measured for monitoring; and an operation parameter adjustment circuit 107 for adjusting an operation parameter 108 supplied to the integrated circuit body 106A based on the measured parameter 104A of the element to be measured for monitoring.