Invention Grant
- Patent Title: Microelectromechanical tunable inductor
- Patent Title (中): 微机电可调电感
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Application No.: US11746147Application Date: 2007-05-09
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Publication No.: US07710232B1Publication Date: 2010-05-04
- Inventor: Harold L. Stalford , Vincent M. Hietala , James G. Fleming
- Applicant: Harold L. Stalford , Vincent M. Hietala , James G. Fleming , Carol Fleming, legal representative
- Applicant Address: US NM Albuquerque
- Assignee: Sandia Corporation
- Current Assignee: Sandia Corporation
- Current Assignee Address: US NM Albuquerque
- Agent John P. Hohimer
- Main IPC: H01F27/29
- IPC: H01F27/29 ; H01F21/04 ; H01F5/00 ; H01H57/00 ; H02N1/00 ; H01G5/00

Abstract:
A microelectromechanical tunable inductor is formed from a pair of substantially-identically-sized coils arranged side by side and coiled up about a central axis which is parallel to a supporting substrate. An in-plane stress gradient is responsible for coiling up the coils which. The inductance provided by the tunable inductor can be electrostatically changed either continuously or in discrete steps using electrodes on the substrate and on each coil. The tunable inductor can be formed with processes which are compatible with conventional IC fabrication so that, in some cases, the tunable inductor can be formed on a semiconductor substrate alongside or on top of an IC.
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