Invention Grant
US07710549B2 Apparatus for detecting speed of movable body and drive stage using the same 失效
用于检测移动体的速度的装置和使用其的驱动台

Apparatus for detecting speed of movable body and drive stage using the same
Abstract:
A movable-body-speed-detecting apparatus includes a movable body capable of moving linearly and/or circularly, a plate fixed to the movable body, the plate having a predetermined length in a direction in which the movable body moves, and light emission/reception means arranged such that light output from a light-emitting element enters a light-receiving element. The plate has a window section that passes between the light-emitting element and the light-receiving element in accordance with movement of the movable body and that blocks or allows passage of light to the light-receiving element. The apparatus further comprises speed calculation means for calculating the speed of the movable body by converting the amount of light received by the light-receiving element into a signal and measuring the signal.
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