Invention Grant
US07711177B2 Methods and systems for detecting defects on a specimen using a combination of bright field channel data and dark field channel data
有权
使用亮场通道数据和暗场通道数据的组合来检测样本上的缺陷的方法和系统
- Patent Title: Methods and systems for detecting defects on a specimen using a combination of bright field channel data and dark field channel data
- Patent Title (中): 使用亮场通道数据和暗场通道数据的组合来检测样本上的缺陷的方法和系统
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Application No.: US11422955Application Date: 2006-06-08
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Publication No.: US07711177B2Publication Date: 2010-05-04
- Inventor: Brian Leslie , Ashok Kulkarni
- Applicant: Brian Leslie , Ashok Kulkarni
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Technologies Corp.
- Current Assignee: KLA-Tencor Technologies Corp.
- Current Assignee Address: US CA Milpitas
- Agent Ann Marie Mewherter
- Main IPC: G06K9/00
- IPC: G06K9/00 ; G01N37/00 ; G01D3/00

Abstract:
Various methods, carrier media, and systems for detecting defects on a specimen using a combination of bright field channel data and dark field channel data are provided. One computer-implemented method includes combining pixel-level data acquired for the specimen by a bright field channel and a dark field channel of an inspection system. The method also includes detecting defects on the specimen by applying a two-dimensional threshold to the combined data. The two-dimensional threshold is defined as a function of a threshold for the data acquired by the bright field channel and a threshold for the data acquired by the dark field channel.
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