Invention Grant
US07711177B2 Methods and systems for detecting defects on a specimen using a combination of bright field channel data and dark field channel data 有权
使用亮场通道数据和暗场通道数据的组合来检测样本上的缺陷的方法和系统

Methods and systems for detecting defects on a specimen using a combination of bright field channel data and dark field channel data
Abstract:
Various methods, carrier media, and systems for detecting defects on a specimen using a combination of bright field channel data and dark field channel data are provided. One computer-implemented method includes combining pixel-level data acquired for the specimen by a bright field channel and a dark field channel of an inspection system. The method also includes detecting defects on the specimen by applying a two-dimensional threshold to the combined data. The two-dimensional threshold is defined as a function of a threshold for the data acquired by the bright field channel and a threshold for the data acquired by the dark field channel.
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