Invention Grant
US07712888B2 Inkjet printing system for manufacturing thin film transistor array
有权
用于制造薄膜晶体管阵列的喷墨打印系统
- Patent Title: Inkjet printing system for manufacturing thin film transistor array
- Patent Title (中): 用于制造薄膜晶体管阵列的喷墨打印系统
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Application No.: US11544092Application Date: 2006-10-06
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Publication No.: US07712888B2Publication Date: 2010-05-11
- Inventor: Yong-Uk Lee , Mun-Pyo Hong , Joon-Hak Oh
- Applicant: Yong-Uk Lee , Mun-Pyo Hong , Joon-Hak Oh
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Innovations Counsel LLP
- Priority: KR10-2005-0123136 20051214
- Main IPC: B41J29/38
- IPC: B41J29/38 ; B41J2/195 ; B41J2/01 ; H01L35/24 ; H01L51/40

Abstract:
An inkjet printing system according to an exemplary embodiment of the present invention includes an inkjet printing chamber depositing ink on a substrate, and a drying chamber spaced from inkjet printing chamber by a predetermined interval and drying the ink by regulating a vapor pressure of a solvent of the ink deposited on substrate. The drying chamber is provided separately, and the vapor pressure of the solvent within the drying chamber is regulated, so that the drying speed of the ink is regulated so as to improve the crystallinity of the organic semiconductor.
Public/Granted literature
- US20070132825A1 Inkjet printing system for manufacturing thin film transistor array Public/Granted day:2007-06-14
Information query
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