Invention Grant
- Patent Title: Insulated gate semiconductor device and the method of manufacturing the same
- Patent Title (中): 绝缘栅半导体器件及其制造方法
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Application No.: US12122291Application Date: 2008-05-16
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Publication No.: US07714353B2Publication Date: 2010-05-11
- Inventor: Yuichi Onozawa
- Applicant: Yuichi Onozawa
- Applicant Address: JP
- Assignee: Fuji Electric Device Technology Co., Ltd.
- Current Assignee: Fuji Electric Device Technology Co., Ltd.
- Current Assignee Address: JP
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2007-131119 20070517
- Main IPC: H01L29/74
- IPC: H01L29/74 ; H01L21/332

Abstract:
A trench-type insulated-gate semiconductor device is disclosed that includes unit cells having a trench gate structure that are scattered uniformly throughout the active region of the device. The impurity concentration in the portion of a p-type base region, sandwiched between an n+-type emitter region and an n-type drift layer and in contact with a gate electrode formed in the trench via a gate insulator film, is the lowest in the portion thereof sandwiched between the bottom plane of n+-type emitter regions and the bottom plane of p-type base region and parallel to the major surface of a silicon substrate. The trench-type insulate-gate semiconductor device according to the invention minimizes the variation of the gate threshold voltage.
Public/Granted literature
- US20080315250A1 INSULATED GATE SEMICONDUCTOR DEVICE AND THE METHOD OF MANUFACTURING THE SAME Public/Granted day:2008-12-25
Information query
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