Invention Grant
- Patent Title: Semiconductor memory device and manufacturing method thereof
- Patent Title (中): 半导体存储器件及其制造方法
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Application No.: US11563889Application Date: 2006-11-28
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Publication No.: US07714388B2Publication Date: 2010-05-11
- Inventor: Hiroomi Nakajima
- Applicant: Hiroomi Nakajima
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2006-067650 20060313
- Main IPC: H01L27/12
- IPC: H01L27/12

Abstract:
This discloser concerns a semiconductor device including an insulation layer; a FIN-type semiconductor layer provided on the insulation layer and including a floating body region in an electrically floating state and including a source region and a drain region at both sides of the floating body region; gate insulation films provided on both side surfaces of the floating body region; gate electrodes provided on both side surfaces of the floating body region via the gate insulation films; and a source electrode and a drain electrode respectively contacting with the upper surface of the source region and the drain region, wherein in the cross section of the FIN-type semiconductor layer in parallel with the surface of the insulation layer, a thickness of the FIN-type semiconductor layer in the floating body region is smaller than a thickness of the FIN-type semiconductor layer in the source and the drain regions.
Public/Granted literature
- US20070210383A1 SEMICONDUCTOR MEMORY DEVICE AND MANUFACTURING METHOD THEREOF Public/Granted day:2007-09-13
Information query
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