A semiconductor device is provided that includes one or more ceramic material layers and one or more low dielectric constant (low-K) epoxy layers on top to be electrically coupled to an integrated circuit device, such as a chip die. The resulting ceramic/organic hybrid substrate takes advantage of the thin low-cost, low-K epoxy layer, by routing the dense circuitry from the chip die to the ceramic material layer. In addition, the use of low-K epoxy layer may reduce the number of ceramic material layers required to about three layers, thus significantly reducing the cost of the substrate. Low-K epoxy material layer may be laminated onto the ceramic material layer to reduce throughput time and cost. The ceramic/organic hybrid substrate may also take advantage of the properties of ceramic materials, which have a much more rigid structure than organic materials and a low CTE (coefficient of thermal expansion) that works well with ultra low-K chip dies. The ceramic/organic hybrid substrate also may make possible the fabrication of a bottom cavity package for capacitors placement.