Invention Grant
- Patent Title: Piezoelectric thin-film acoustic wave device and information processing unit using the same
- Patent Title (中): 压电薄膜声波器件及其使用的信息处理单元
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Application No.: US11442355Application Date: 2006-05-30
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Publication No.: US07714485B2Publication Date: 2010-05-11
- Inventor: Takashi Shiba , Kazuo Tsubouchi , Kensei Uehara , Hiroyuki Nakase , Suguru Kameda , Yoji Isota , Yasuo Cho
- Applicant: Takashi Shiba , Kazuo Tsubouchi , Kensei Uehara , Hiroyuki Nakase , Suguru Kameda , Yoji Isota , Yasuo Cho
- Applicant Address: JP Oshu-shi
- Assignee: Hitachi Media Electronics Co., Ltd.
- Current Assignee: Hitachi Media Electronics Co., Ltd.
- Current Assignee Address: JP Oshu-shi
- Agency: Antonelli, Terry, Stout & Kraus, LLP.
- Priority: JP2005-158300 20050531
- Main IPC: H01L41/04
- IPC: H01L41/04

Abstract:
A piezoelectric thin-film acoustic wave device formed of a piezoelectric thin film of AlN on the +C plane and having the polarization strength of not lower than 0.63×10−20 F/V and an information processing unit using the same are disclosed. This is the result of the inventors having studied the factors other than the C-axis orientation affecting the electromechanical coupling factor and developing a method of improving the electromechanical coupling factor in view of the occasional fact that the electromechanical coupling factor cannot be improved by improving the C-axis orientation and the electromechanical coupling factor required for the piezoelectric thin-film acoustic wave device is not obtained. In such a case, the receiving sensitivity of the receiving system may be deteriorated and the transmission strength of the transmission system is required to be increased undesirably having an adverse effect on the power saving efforts.
Public/Granted literature
- US20070024157A1 Piezoelectric thin-film acoustic wave device and information processing unit using the same Public/Granted day:2007-02-01
Information query
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