Invention Grant
- Patent Title: Angular velocity sensor and angular velocity sensing device
- Patent Title (中): 角速度传感器和角速度检测装置
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Application No.: US12078050Application Date: 2008-03-26
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Publication No.: US07714486B2Publication Date: 2010-05-11
- Inventor: Kenichi Tochi , Tatsuo Namikawa , Ken Unno , Takao Noguchi
- Applicant: Kenichi Tochi , Tatsuo Namikawa , Ken Unno , Takao Noguchi
- Applicant Address: JP Tokyo
- Assignee: TDK Corporation
- Current Assignee: TDK Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oliff & Berridge, PLC
- Priority: JP2007-091269 20070330
- Main IPC: H01L41/08
- IPC: H01L41/08

Abstract:
The present invention provides an angular velocity sensor in which higher sensitivity for sensors is available even with a smaller base portion. The angular velocity sensor includes a fixed portion fixed to the top surface of a sensor element supporting portion of a casing, an upper detection arm and a lower detection arm, each of them being connected to the fixed portion on sides opposite to each other and extending along a plane parallel to the top surface of the sensor element supporting portion, and a pair of upper vibration arms connected to the fixed portion in such a manner as to form a pair of arms with the upper detection arm in between and extending in a direction parallel to the extending direction of the upper detection arm.
Public/Granted literature
- US20090039739A1 Angular velocity sensor and angular velocity sensing device Public/Granted day:2009-02-12
Information query
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