Invention Grant
- Patent Title: Excimer lamp having UV-reflecting film
- Patent Title (中): 准分子灯具有UV反射膜
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Application No.: US12248396Application Date: 2008-10-09
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Publication No.: US07714511B2Publication Date: 2010-05-11
- Inventor: Takafumi Mizojiri , Satoshi Matsuzawa , Shigeki Fujisawa , Yukihiro Morimoto
- Applicant: Takafumi Mizojiri , Satoshi Matsuzawa , Shigeki Fujisawa , Yukihiro Morimoto
- Applicant Address: JP Tokyo
- Assignee: Ushiodenki Kabushiki Kaisha
- Current Assignee: Ushiodenki Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Roberts Mlotkowski Safran & Cole, P.C.
- Agent David S. Safran
- Priority: JP2007-265350 20071011
- Main IPC: H01J61/35
- IPC: H01J61/35 ; H01J65/00

Abstract:
An excimer lamp which can emit UV radiation with a high degree of efficiency and high degree of uniformity, has a UV-reflecting film that does not peel. The excimer lamp is fitted with a silica glass discharge vessel that encloses a discharge gas which forms excimer molecules by dielectric barrier discharge in an internal space enclosed by a top wall panel, a bottom wall panel, side wall panels and end panels and with an electrode on both the outer surface of the top wall panel and another electrode on the outer surface of the bottom wall panel. On the inner surface of the discharge vessel, a UV-reflecting film comprised of silica and alumina particles is formed, at least, on the inner surface area of the side wall panels with the silica particles composing at least 30 weight % of the UV-reflecting film.
Public/Granted literature
- US20090096377A1 EXCIMER LAMP Public/Granted day:2009-04-16
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