Invention Grant
- Patent Title: Projection optical system
- Patent Title (中): 投影光学系统
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Application No.: US11751139Application Date: 2007-05-21
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Publication No.: US07714985B2Publication Date: 2010-05-11
- Inventor: Hiroyuki Yuuki , Takashi Kato
- Applicant: Hiroyuki Yuuki , Takashi Kato
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A., Inc., IP Division
- Priority: JP2006-171505 20060621
- Main IPC: G03B27/54
- IPC: G03B27/54 ; G03B27/72 ; G03B27/42

Abstract:
At least one exemplary embodiment is directed to a projection optical system that projects an image of a pattern of a first object onto a second object includes a first image forming optical system, a second image forming optical system, and a light-shielding member. The first image forming optical system forms an intermediate image of the pattern, and includes a concave mirror and a reflecting mirror. The concave mirror has a reflecting surface opposing the second object. The reflecting mirror directs light from the first object to the concave mirror. The second image forming optical system forms an image of the intermediate image onto the second object, and includes a lens. The light-shielding member is disposed between the concave mirror and the lens.
Public/Granted literature
- US20070297047A1 PROJECTION OPTICAL SYSTEM Public/Granted day:2007-12-27
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