Invention Grant
US07715101B2 Electromagnetic radiation pulse duration control apparatus and method
失效
电磁辐射脉冲持续时间控制装置及方法
- Patent Title: Electromagnetic radiation pulse duration control apparatus and method
- Patent Title (中): 电磁辐射脉冲持续时间控制装置及方法
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Application No.: US11860309Application Date: 2007-09-24
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Publication No.: US07715101B2Publication Date: 2010-05-11
- Inventor: Hako Botma
- Applicant: Hako Botma
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Main IPC: G02B27/10
- IPC: G02B27/10 ; G02B27/14

Abstract:
Apparatus and methods are used for controlling electromagnetic radiation pulse duration in a lithographic apparatus. A dividing element is arranged to divide an electromagnetic radiation pulse into a first portion and a second portion. A prism receives, refracts, and subsequently emits the first portion of the electromagnetic radiation pulse. A directing element is arranged to direct the first and second portions of the electromagnetic radiation pulse parallel to a common optical axis. The first portion combines with the second portion to form a combined radiation beam pulse. The combined radiation beam pulse has a longer pulse duration than the divided electromagnetic pulse and experiences no corresponding loss in intensity.
Public/Granted literature
- US20090080085A1 Electromagnetic Radiation Pulse Duration Control Apparatus and Method Public/Granted day:2009-03-26
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