Invention Grant
- Patent Title: Electrostatic chuck with separated electrodes
- Patent Title (中): 静电吸盘与分离电极
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Application No.: US11690950Application Date: 2007-03-26
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Publication No.: US07715170B2Publication Date: 2010-05-11
- Inventor: Julian G. Blake , Dale K. Stone , Lyudmila Stone , David Suuronen
- Applicant: Julian G. Blake , Dale K. Stone , Lyudmila Stone , David Suuronen
- Applicant Address: US MA Glouster
- Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee Address: US MA Glouster
- Main IPC: H01L21/683
- IPC: H01L21/683 ; H01T23/00
Abstract:
Electrostatic clamping devices and methods for reducing contamination to a workpiece coupled to an electrostatic clamping device are disclosed. According to an embodiment an electrostatic clamping device for coupling a workpiece comprises: an embossment portion on a surface of a body to contact the workpiece; and at least two electrodes within the body; wherein the two electrodes are separated by a separation portion below the embossment portion.
Public/Granted literature
- US20080239614A1 ELECTROSTATIC CHUCK WITH SEPARATED ELECTRODES Public/Granted day:2008-10-02
Information query
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