A semiconductor integrated circuit includes a target circuit with at least a scan chain having sub scan chains of stages to sequentially shift a test data in response to a clock signal in a scan path test mode, and each of the sub scan chains includes first flip-flops connected in series. A backup control circuit controls the target circuit and a memory such that a plurality of sub internal state data of a data indicating an internal state of the target circuit are stored as a plurality of write data in the memory in a save mode through the sub scan chains and the plurality of sub internal state data are read out from the memory as a plurality of read data and set in the sub scan chains in a restore mode.