Invention Grant
- Patent Title: Method for manufacturing a thin film magnetic head
- Patent Title (中): 薄膜磁头制造方法
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Application No.: US11588866Application Date: 2006-10-27
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Publication No.: US07716811B2Publication Date: 2010-05-18
- Inventor: Takateru Seki , Akihiro Namba , Hideo Yamakura , Takahiro Noji
- Applicant: Takateru Seki , Akihiro Namba , Hideo Yamakura , Takahiro Noji
- Applicant Address: NL Amsterdam
- Assignee: Hitachi Global Storage Technologies Netherlands B.V.
- Current Assignee: Hitachi Global Storage Technologies Netherlands B.V.
- Current Assignee Address: NL Amsterdam
- Agency: Townsend and Townsend and Crew LLP
- Agent Rambod Nader
- Priority: JP2005-314100 20051028
- Main IPC: G11B5/127
- IPC: G11B5/127 ; H04R31/00

Abstract:
Head elements are formed on a wafer to suppress deterioration in pinning strength of a pinned layer, which is caused by ESD generated during air bearing surface polishing of a thin film magnetic head. The wafer is cut into rovers in each of which are connected head elements. Rover air bearing surfaces are polished until an MR elements attain a predetermined height. A final polishing step finishes air bearing surfaces by applying an electroconductive polishing liquid to achieve a predetermined shape and surface roughness with high accuracy. A pinning defect occurrence rate is reduced by suppressing deterioration in pinning strength of a pinned layer of a read element. To achieve this, a specific resistance of the electroconductive polishing liquid is controlled to 5 GΩ·cm or less. A shallow rail and a deep rail are formed on the air bearing surfaces, and the rover is cut into thin film magnetic heads.
Public/Granted literature
- US20070119046A1 Method for manufacturing a thin film magnetic head Public/Granted day:2007-05-31
Information query
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