Invention Grant
US07716813B2 Method for fabricating magnetic write pole for a magnetic head using an E-beam resist mask 有权
使用电子束抗蚀剂掩模制造用于磁头的磁写磁极的方法

Method for fabricating magnetic write pole for a magnetic head using an E-beam resist mask
Abstract:
A method is disclosed for independently controlling track width and bevel angle of a write pole tip of a magnetic recording head. The method includes establishing the track width in the pole tip layer material utilizing E-beam lithography. A portion of this pole tip material having the established track width is protected by providing a temporary masking material to make a protected portion. At least one unprotected portion is left exposed to be shaped. This unprotected portion is then beveled to produce at least one beveled portion. The protected portion produces an upper pole tip portion which together with the beveled portion produce an improved pole tip. Also disclosed is a magnetic head having the improved pole tip, and a disk drive having a magnetic head having the improved pole tip.
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