Invention Grant
- Patent Title: Barrier assembly for an exposure apparatus
- Patent Title (中): 用于曝光设备的屏障组件
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Application No.: US11126444Application Date: 2005-05-10
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Publication No.: US07717966B2Publication Date: 2010-05-18
- Inventor: Douglas C. Watson
- Applicant: Douglas C. Watson
- Applicant Address: JP Tokyo
- Assignee: Nikon Corporation
- Current Assignee: Nikon Corporation
- Current Assignee Address: JP Tokyo
- Agency: Roeder & Broder LLP
- Main IPC: H01L21/00
- IPC: H01L21/00 ; F16L11/22
Abstract:
A barrier assembly (58) for sealing an assembly gap (274) between a first assembly (266) and a second assembly (268) includes a first barrier (270) that seals the assembly gap (274) and a second barrier (272) that seals the assembly gap (274). The barriers (270) (272) can be spaced apart. Further, the first barrier(270) provides a flexible pressure barrier that seals the assembly gap (274) and the second barrier (272) provides a flexible barrier that inhibits the first barrier (270) from contaminating a chamber environment within the assemblies (266) (268). Additionally, the barrier assembly (58) includes a barrier source (62) that controls a barrier environment between the barriers (270) (272).
Public/Granted literature
- US20060258153A1 Barrier assembly for an exposure apparatus Public/Granted day:2006-11-16
Information query
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