Invention Grant
- Patent Title: Apparatus for cleaning and drying substrates
- Patent Title (中): 用于清洁和干燥基材的设备
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Application No.: US11834657Application Date: 2007-08-06
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Publication No.: US07718011B2Publication Date: 2010-05-18
- Inventor: Boris Fishkin , Michael Sherrard
- Applicant: Boris Fishkin , Michael Sherrard
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Dugan & Dugan
- Main IPC: B08B3/04
- IPC: B08B3/04 ; B08B5/00 ; B08B7/04
Abstract:
A method and apparatus for cleaning, rinsing and Marangoni drying substrates is provided. The invention includes spraying a line of fluid to a substrate, thereby creating an air/fluid interface line on the substrate; supplying a line of drying vapors to the air/fluid interface line, thereby creating a Marangoni drying effect along the air/fluid interface line; and moving the substrate relative to the air/fluid line. Numerous other aspects are provided.
Public/Granted literature
- US20070272278A1 APPARATUS FOR CLEANING AND DRYING SUBSTRATES Public/Granted day:2007-11-29
Information query
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