Invention Grant
- Patent Title: Mask frame and method of fixing mask on the mask frame
- Patent Title (中): 掩模框和将掩模固定在掩模框上的方法
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Application No.: US11325560Application Date: 2006-01-05
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Publication No.: US07718031B2Publication Date: 2010-05-18
- Inventor: Hee-Cheol Kang , Jin-Kyoo Kim
- Applicant: Hee-Cheol Kang , Jin-Kyoo Kim
- Applicant Address: KR Yongin, Gyunggi-Do
- Assignee: Samsung Mobile Display Co., Ltd.
- Current Assignee: Samsung Mobile Display Co., Ltd.
- Current Assignee Address: KR Yongin, Gyunggi-Do
- Agent Robert E. Bushnell, Esq.
- Priority: KR10-2005-0000962 20050105
- Main IPC: C23F1/00
- IPC: C23F1/00 ; H01L21/306 ; B29D11/00 ; H01J9/12
Abstract:
A mask frame on which a mask, having a pattern area and a mask edge defining the pattern area, is fixed comprises: a through opening corresponding to the pattern area; and a base corresponding to the mask edge. The base is provided with discharging holes formed therein, and a vacuum pump is coupled to the discharging holes so that the mask is fixed to the mask frame without damaging the pattern formed on the pattern area of the mask.
Public/Granted literature
- US20060148368A1 Mask frame and method of fixing mask on the mask frame Public/Granted day:2006-07-06
Information query
